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\u9540\u819c\u73bb\u7483\u662f\u5728\u73bb\u7483\u8868\u9762\u6d82\u9540\u4e00\u5c42\u6216\u591a\u5c42\u91d1\u5c5e\uff0c\u5408\u91d1\u6216\u91d1\u5c5e\u5316\u5408\u7269\u8584\u819c\uff0c\u6216\u5c06\u91d1\u5c5e\u79bb\u5b50\u8fc1\u79fb\u5230\u73bb\u7483\u8868\u9762\u5c42\uff0c\u4ee5\u6539\u53d8\u73bb\u7483\u7684\u5149\u5b66\u6027\u80fd\uff0c\u6ee1\u8db3\u67d0\u79cd\u7279\u5b9a\u8981\u6c42\u7684\u4e00\u79cd\u73bb\u7483\u6df1\u52a0\u5de5\u4ea7\u54c1\u3002<\/p>\n
\u8e31\u819c\u73bb\u7483\u7684\u4e3b\u8981\u751f\u4ea7\u65b9\u6cd5<\/p>\n
1,\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5<\/p>\n
\u5316\u5b66\u6c14\u76f8\u6c89\u79ef(chemical vapour deposition, CVD) \u662f\u628a\u542b\u6709\u6784\u6210\u8584\u819c\u5143\u7d20\u7684\u4e00\u79cd\u6216\u51e0\u79cd\u5316\u5408\u7269\u6216\u5355\u8d28\u6c14\u4f53\uff0c\u4f9b\u7ed9\u57fa\u677f\uff0c\u5229\u7528\u6c14\u76f8\u53cd\u5e94\uff0c\u5728\u57fa\u677f\u8868\u9762\u4e0a\u53cd\u5e94\u6c89\u79ef\u51fa\u6240\u9700\u56fa\u4f53\u8584\u819c\u7684\u5de5\u827a\u6280\u672f\uff0c\u8be5\u6280\u672f\u5df2\u6210\u4e3a\u9540\u819c\u73bb\u7483\u751f\u4ea7\u7684\u4e3b\u8981\u5236\u5907\u6280\u672f\u3002<\/p>\n
\u5728\u7ebfCVD\u6cd5\u9540\u819c\u6280\u672f\uff0c\u662f\u5728\u6d6e\u6cd5\u73bb\u7483\u751f\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u8fde\u7eed\u6c89\u79ef\u5316\u5408\u7269\u8584\u819c\u7684CVD\u5de5\u827a\u6280\u672f\uff0c\u662f\u76ee\u524d\u4e16\u754c\u4e0a\u6bd4\u8f83\u5148\u8fdb\u7684\u9540\u819c\u73bb\u7483\u751f\u4ea7\u6280\u672f\u3002\u5b83\u662f\u4ee5\u6d01\u51c0\u3001\u9ad8\u901f\u7275\u5f15(8-15m\/min)\u3001\u9ad8\u6e29(600\u2103)\u7684\u6d6e\u6cd5\u73bb\u7483\u4e3a\u6c89\u79ef\u886c\u5e95\u3002\u6362\u8a00\u4e4b\uff0c\u8584\u819c\u6c89\u79ef\u524d\uff0c\u73bb\u7483\u886c\u5e95\u5373\u5c06\u79bb\u5f00\u9521\u69fd\u4f46\u5c1a\u672a\u8fdb\u4eba\u9000\u706b\u7a91\uff0c\u4e14\u672a\u88ab\u5904\u7406\u51c0\u5316\u3002\u56fd\u5916\u6700\u65e9\u91c7\u7528\u5728\u7ebfCVD\u6cd5\u8fde\u7eed\u6c89\u79efSn02\u8584\u819c\uff0c\u800c\u6211\u56fd\u6700\u65e9\u662f\u7528\u8be5\u6cd5\u751f\u4ea7\u7845\u8d28\u9540\u819c\u73bb\u7483\u3002\u76ee\u524d\uff0c\u6211\u56fd\u5df2\u57fa\u672c\u638c\u63e1\u4e86\u5728\u7ebfCVD\u6cd5\u9540\u819c\u6280\u672f\uff0c\u80fd\u591f\u7a33\u5b9a\u5730\u751f\u4ea7\u7845\u8d28\u9540\u819c\u73bb\u7483\u3001\u5728\u7ebfLow-E\u73bb\u7483\u548c\u5728\u7ebf\u81ea\u6d01\u51c0\u73bb\u7483\u3002\u5728\u7ebf\u9540\u819c\u73bb\u7483\u751f\u4ea7\u7ebf\u5982\u56fe1\u6240\u793a\u3002<\/p>\n
2\uff0c\u56fa\u4f53\u7c89\u672b\u55b7\u6d82\u6cd5<\/p>\n
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3\uff0c\u771f\u7a7a\u84b8\u6e21\u6cd5<\/p>\n
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4\uff0c\u771f\u7a7a\u78c1\u63a7\u6e85\u5c04\u6cd5<\/p>\n
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\u603b\u7ed3<\/p>\n
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